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Turbo Molecular Pumps
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FF-160/620NE
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Vacuum Acqisition Equipment > FF-160/620NE Turbomoleculer Pump for Corrosive Application

FF-160/620NE Turbomoleculer Pump

Techncial Parameters:

Type
620NE-LF
620NE-CF
Pump Type
Drag
Drag
Inlet Flange
ISO-160
CF-160
Outlet Flange
ISO-40
ISO-40
Pumping Speed (Air) (l/s)
600
600
Pressure for Max Speed(torr)
7.5 x 10-3
7.5 x 10-3
Rotation Speed (RPM)
27,000
27,000
Compression Ratio
H2
6 x 103
6 x 103
N2
1 x 109
1 x 109
Ultimate Vacuum(torr)
4.5 ¡Á 10-8
4.5 ¡Á 10-9
Run-Up Time (min.)
< 5
< 5
Control Unit
FD-600K
FD-600K
Input Voltage (Vac)
220/110 ¡À10%
220/110 ¡À10%
Purge Port
KF16
KF16
Cooling Water (GPM)
> 0.5
> 0.5
Bearing Type
ceramic
ceramic
Ceramic
oil
oil
Operating Orientation
vertical (¡À5¡ã)
vertical (¡À5¡ã)
Weight (Lb/Kg)
64/29
64/29

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