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FJ-620/FJ-500F Molecular Pump Unit
Vacuum Acqisition Equipment > FJ-620/FJ-500F Molecular Pump Unit

FJ-620/FJ-500F Molecular Pump Unit

FJ-620/FJ-500F series combined molecular pump unit is a clean and ultra-high vacuum acquisition equipment with various F160/620 series combined molecular pumps or FF-160/500F combined molecular pumps, fore-pump, cutoff vent valve, backing line, water shutoff protector, molecular pump power pack, control power pack etc. assembled on the stand. It provides convenient installation, simple operation, easy connection, reliable performance, and is widely used in surface analysis, accelerator technique, semi-conductive devices, plasma technique, manufacturing of electro-vacuum elements and vacuum technique etc.

Techncial Parameters:

Type
FJ-620
FJ-620T
FJ-620N
Pumping Speed (50Hz)
DN160LF
DN160CF
DN160LF
DN160CF
DN160LF
DN160CF
Pumping rate L/S (for air)
600
600
600
Compression Ratio N2
109
109
109
H2
6103
6103
6103
Ultimate Pressure (Pa)
610-6
610-7
610-6
610-7
610-6
610-7
Input Voltage/Frequency (V/Hz)
38020/501
Cooling Water Pressure (kg/cm-2)
0.51
Fore Pump Type
RVP-6
Ambient Temperature
440 °C

Type
FJ-620C
FJ-500F
Pumping Speed (50Hz)
DN160LF
DN160CF
DN160LF
DN160CF
Pumping rate L/S (for air)
600
500
Compression Ratio N2
109
109
H2
6103
6103
Ultimate Pressure (Pa)
610-7
610-8
610-6
610-7
Input Voltage/Frequency (V/Hz)
38020/501
Cooling Water Pressure (kg/cm-2)
0.51
Fore Pump Type
RVP-6
Ambient Temperature
440 °C

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