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Sputtering Ion Pumps
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2L-25
Power Supplies/Drive Controls
Vacuum Acqisition Equipment > 3L-25 Sputtering Ion Pump

3L-25 Sputtering Ion Pump

Techncial Parameters:

Type
3L-25
Connecting Flange
DN35CF
Pumping Rate (L/S) For Air
21
For Helium
6
Starting Pressure (Pa)
¡Ü5¡Á10-4
Ultimate Pressure (Pa)
7¡Á10-8
Baking Temp. (¡æ) With Magnet
£¼200
Without Magnet
£¼300
Working Voltage (KV)
-5
Electrode Number
1
Weight (Kg)
7
Dimension (mm)
222 ¡Á 120 ¡Á 161 (L ¡Á W ¡Á H )

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