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Sputtering Ion Pumps
3L-400C
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Vacuum Acqisition Equipment > 3L-400C Sputtering Ion Pump

3L-400C Sputtering Ion Pump

Techncial Parameters:

Type
3L-400C
Connecting Flange
DN150CF
Pumping Rate (L/S) For Air
420
For Helium
85
Starting Pressure (Pa)
510-4
Baking Temp. () With Magnet
200
Without Magnet
300
Working Voltage (KV)
-5
Electrode Number
4
Weight (Kg)
220
Dimension (mm)
500 265 598 (L W H )

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