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Sputtering Ion Pumps
3L-400C
3L-400
2L-400C
2L-400
2L-200C
2L-200B
3L-100
2L-100
3L-50
2L-50
3L-25
2L-25
Power Supplies/Drive Controls
Vacuum Acqisition Equipment > Ion Pump Power Supplies/Drive Controls

Ion Pump Power Supplies/Drive Controls

The sputtering ion pump power supplies/drive controls is an electronic device specially designed for the sputtering ion pump to start and control operation of the ion pump. The meters on the power pack panel can display working voltage and ion current of the ion pump. Protection function for working overload and excess temperature of the transformer is designed for the power pack. The power pack for sputtering ion pump has standard type and A type: A type power pack additionally has external control (remote control) function except those described above.

Selection of Power Supplies/Drive Controls:
2LD200, 2LD200A type power packs apply to 2L-200, 2L-100, 2L-50, 2L-25 ion pumps; 3LD200, 3LD200A type power packs apply to 3L-200, 3L-100, 3L-50, 3L-25 ion pumps; 3LD4003LD400A type power packs apply to 3L-400 ion pumps.

Techncial Parameters:
Type
Input Voltage (V)
Frequency (Hz)
Output Voltage
(KV) Max.
Output Current (A) Min.
Output Current Detection (A)
Weight (kg)
2LD-200
220/50
+7
0.1
110-7
20
2LD-200A
220/50
+7
0.1
110-7
20
3LD-200
220/50
-5
0.1
110-7
20
3LD-200A
220/50
-5
0.1
110-7
20
2LD-400
220/50
+5
0.1
110-7
20
2LD-400A
220/50
+5
0.1
110-7
20
3LD-400
220/50
-5
0.1
110-7
20
3LD-400A
220/50
-5
0.1
110-7
20

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