Ion Pump Power Supplies/Drive Controls
The sputtering ion pump power supplies/drive controls is an electronic device specially designed for the sputtering
ion pump to start and control operation of the ion pump. The meters on the power pack panel can display working
voltage and ion current of the ion pump. Protection function for working overload and excess temperature of the
transformer is designed for the power pack. The power pack for sputtering ion pump has standard type and
A type: A type power pack additionally has external control (remote control) function except those
described above.
Selection of Power Supplies/Drive Controls:
2LD200, 2LD200A type power packs apply to 2L-200, 2L-100, 2L-50, 2L-25 ion pumps;
3LD200, 3LD200A type power packs apply to 3L-200, 3L-100, 3L-50, 3L-25 ion pumps;
3LD400£¬3LD400A type power packs apply to 3L-400 ion pumps.
Techncial Parameters:
Type |
Input Voltage (V)
Frequency (Hz) |
Output Voltage
(KV) Max. |
Output Current (A) Min. |
Output Current Detection (A) |
Weight (kg) |
2LD-200 |
220/50 |
+7 |
0.1 |
1¡Á10-7 |
20 |
2LD-200A |
220/50 |
+7 |
0.1 |
1¡Á10-7 |
20 |
3LD-200 |
220/50 |
-5 |
0.1 |
1¡Á10-7 |
20 |
3LD-200A |
220/50 |
-5 |
0.1 |
1¡Á10-7 |
20 |
2LD-400 |
220/50 |
+5 |
0.1 |
1¡Á10-7 |
20 |
2LD-400A |
220/50 |
+5 |
0.1 |
1¡Á10-7 |
20 |
3LD-400 |
220/50 |
-5 |
0.1 |
1¡Á10-7 |
20 |
3LD-400A |
220/50 |
-5 |
0.1 |
1¡Á10-7 |
20 |
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